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M.Sc. in MATERIALS SCIENCE AND ENGINEERING
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MEMY-446
Transmission Electron Microscopy

Course Type
Elective
Semester
Second
ECTS Credits
7

Syllabus

Principles of the TEM

Introduction to TEM
History of TEM. Electron vs. light microscopy.
Electron Scattering and Diffraction
Coherent and incoherent scattering. Elastic and inelastic scattering.
Optical Theory and Electron Lenses
Resolution. Electromagnetic lens. Electrostatic lens.

Design of the TEM

Electron Guns and Electron Lenses
Thermionic guns and field-emission guns (FEGs). Condenser, objective and projector lens. Apertures and diaphragms. Lens aberrations (spherical aberration, chromatic aberration and astigmatism). Depth of focus and depth of field.
Imaging System
Electron detectors. Image recording.
Vacuum Systems
Mechanical pump. Diffusion pump. Sputter-ion pump. Turbomolecular pump.

Other Modes of TEM

X-ray microanalysis
X-ray formation. Energy-dispersive X-ray spectroscopy.
Electron diffraction
Atomic scattering factor. Diffraction by crystals and Bragg's law. Camera length and camera constant. Producing the diffraction pattern.

Sample Preparation

Specimens' preparation for materials science
Specimen support grids. Creating thin disks (Electropolishing, Ion Milling). Microtomy.

Learning Outcomes

This course includes an introduction to the basic principles of electron microscopy with emphasis on scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The principles of electron microscopy and electromagnetic lenses are described. Upon successful completion of the course, students will be able to:

Suggested Bibliography

  1. D.B. Williams, C.B. Carter, Transmission Electron Microscopy: A Textbook for Materials Science, Plenum Press, New York, 1996.
  2. Brent Fultz, James M. Howe, Transmission Electron Microscopy and Diffractometry of Materials, 3rd Ed., Springer, Berlin, 2008.
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